Invited Speakers

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Scientific and Technological Sessions

1) Fundamentals for Plasmas , Films and Coatings

  • 1. Advanced plasma physics
    Title Name Affiliation Nationality Presentation title
    Dr. Masaaki Matsukuma Tokyo Electron Limited JAPAN Ion bombardment damage of Si/Ge/SiGe substrate – the beam and the molecular dynamics simulation study
  • 2. Modeling and simulation of films and coatings
    Title Name Affiliation Nationality Presentation title
    Prof. Hae June Lee Pusan National University KOREA A Hybrid Simulation Coupled with a High Performance Particle-in-Cell Monte Carlo Method for Plasma Surface Interactions of Low Temperature Plasmas
    Dr. Jiri Houska University of West Bohemia CZECH Transition-metal based functional coatings: Effect of the choice of metal element
    Dr. Jung-Sik Yoon National Fusion Research Institute KOREA Atomic and Molecular Data for Plasma Technology-Challenges and Opportunities
  • 3. Plasma diagnostics and plasma chemistry
    Title Name Affiliation Nationality Presentation title
    Prof. HolgerKersten Kiel University, Germany GERMANY Non-conventional plasma and sheath diagnostics for process plasmas
    Prof. Shin-Jae You Chungnam National University KOREA Overfiew of the Cutoff Probe Research

2) Plasma Sources and Processes

  • 1. Magnetron sputtering, HiPIMS, Hybrid plasmas
    Title Name Affiliation Nationality Presentation title
    Prof. Jindrich Musil University of West Bohemia CZECH Hard Flexible Coatings Prepared By Magnetron Sputtering
    Dr. Siegfried Krassnitzer Oerlikon Balzers Coating AG LIECHTENSTEIN S3p™, the HiPIMS solution of OerlikonBalzers. Introduction to the technology, coating performance and outlook
    Prof. Günter Bräuer FhG IST GERMANY Combining plasma with other deposition techniques – Advanced surfaces by hybrid processes
    Prof. Hirotaka Toyoda Nagoya Univeristy JAPAN Toward Real Uniform Sputtering – Spatial Uniformity of Thickness and Quality
    Prof. Arutiun Ehiasarian Sheffild Hallem university, UK UK High Power Impulse Magnetron Sputtering : Plasma Properties and Coating Growth
    Dr. Andre Anders Lawrence Berkeley National Laboratory USA Magnetron Sputtering: Ionization Zones in DC and HiPIMS Modes
  • 3. Atmospheric and high pressure plasma
    Title Name Affiliation Nationality Presentation title
    Prof. Se Youn Moon Chonbuk National University KOREA Rapid formation of superhydrophobic surface using atmospheric-pressure plasma and its applications
    Prof. Remi Dussart Univ. Orleans/CNRS FRANCE DC and AC microplasmas on silicon : performances and limitations
    Prof. Xingwen Li Xi'an Jiaotong University CHINA Study of the dynamics of the nanosecond laser produced metals plasmas in air
    Dr. Pascal Chabert Ecole Polytechnique FRANCE Models of various microplasma sources to produce reactive oxygen species
    Prof. XinPei Lu HuaZhong University of Sci. & Tech. CHINA On several key reactive species of APPJ for plasma medicine
  • 4. Plasma diffusion and thermal plasma
    Title Name Affiliation Nationality Presentation title
    Prof. Takayuki Watanabe Kyushu University JAPAN Water Thermal Plasmas for Environmental Application
    Dr. Peter Kaestner Technical University of Braunschweig GERMANY Plasma Diffusion Treatment – the recent state of technology
  • 5. Plasma in solution
    Title Name Affiliation Nationality Presentation title
    Prof. Fumiyoshi Tochikubo Tokyo Metropolitan University JAPAN Plasma-Induced Electrochemical Reaction and Its Application for Magnetite Nanoparticle Generation
    Prof. Koichi Sasaki Hokkaido University JAPAN Productions of liquid-phase plasmas using optical and acoustic powers
    Prof. Sang Yul Lee Korea Aerospace University KOREA Plasma in solution and its application to the nanoparticle synthesis

3) Digital Electronics Films and Processes

  • TCO, barrier and functional films for digital and flexible electronics
    Title Name Affiliation Nationality Presentation title
    Dr. Ho Jun Kim Samsung Electronics KOREA Importance of fluid dynamic investigation in plasma reactor design
    Dr. Testuya Tatsumi Sony Corporation JAPAN Challenges to control of plasma induced damage on Si devices
    Prof. Pung Keun Song Pusan National University KOREA Nodule formation and arcing generation on magnetron sputtering TCO target

4) Tribological and Protective Coatings and Processes

  • Wear resistance, lubrication, hard and super hard coatings, electrochemical and high temperature protection etc.
    Title Name Affiliation Nationality Presentation title
    Dr. Holger Hoche TU Darmstadt GERMANY How to design PVD coatings with improved corrosion properties
    Prof. Naoto Ohtake Tokyo Inst. Tech. JAPAN Deposition of Diamond-like Carbon Films by Nanopulse Plasma CVD
    Dr. Joerg Patscheider EMPA SWIZERLAND How to Tune the Thermal Conductivity of Hard Coatings - from Theory to Experiments
    Dr. Sven Ulrich KIT Karlsruhe GERMANY New HiPIMS - microwave plasma source - hybrid technology for tribological and protective coatings

6) Plasma Medicine and Bio Technology

  • 1. Medicine
    Title Name Affiliation Nationality Presentation title
    Prof. Jennifer H. Shin KAIST KOREA What Can the Atmospheric Pressure Plasma Do To Biological Systems: From Cells to Organisms?
    Prof. Katharina Stapelmann Rur-University Bochum GERMANY Interaction of reactive species produced by a DBD in air with skin and skin components
  • 2. Agriculture
    Title Name Affiliation Nationality Presentation title
    Prof. Cheorun Jo Seoul National University KOREA Application of atmospheric pressure plasma in meat manufacturing process
    Prof. Koichi Takaki Iwate University JAPAN Plasma and pulsed power applications for agriculture
  • 3. Lifescience
    Title Name Affiliation Nationality Presentation title
    Dr. Kerstin Thorwarth EMPA SWITZERLAND DLC coatings on metallic medical implants: what we can learn from problems of the past
    Prof. Jun seok oh Kochi University of Technology Japan UV absorption spectroscopy for measuring absolute concentration of reactive oxygen and nitrogen species (RONS) in plasma activated water

7) Nano Materials and Devices

Title Name Affiliation Nationality Presentation title
Prof. Rajdeep Singh Rawat National Inst. Education SINGAPOR High growth rate synthesis of carbon nanostructures using high temperature high energy density as well as low temperature plasmas

8) Functional Plasma Surface Treatment

  • topography, grafting, texturing
    Title Name Affiliation Nationality Presentation title
    Dr. Christian Oehr Fraunhofer-IGB Stuttgart GERMANY On stability of plasma functional thin films regarding biomedical application

9) Industrial Technology and Applications

Title Name Affiliation Nationality Presentation title
Dr. Osamu Tsuji SAMCO Inc. JAPAN Plasma cleaning technology in semiconductor back-end process, and its application to LED packaging
Prof. Jung-Hoon Joo Kunsan National University KOREA Reliability of vacuum based plasma processing systems: experimental analysis and numerical simulation
Dr. Haruo Uyama TOPPAN PRINTING Co.,LTD JAPAN Plasma in Coating Technology
Dr. Akira Horikoshi SCREEN Holdings.co.,Ltd. JAPAN Advanced Plasma Material-Process Technologies with Inductively Coupled RF Plasmas Driven by Internal Low-Inductance Antenna

10) Analysis and evaluation

Title Name Affiliation Nationality Presentation title
Prof. Yunseok Kim Sungkyunkwan University KOREA Local probing of growth kinetics in plasma-polymerized films